Recently, MANST successfully delivered its first intelligent spin coating system for display panel applications to a leading customer in the display panel industry. The delivery includes a spin coater, flatbed coater, EBR (Edge Bead Removal) system, Vacuum Drying Chamber (VCD), and supporting equipment. This milestone not only demonstrates the continued recognition of MANST's expertise in precision coating equipment for display panel manufacturing by a leading industry customer, but also further strengthens the company's portfolio of high-end equipment solutions for the pan-semiconductor industry.

To address the diverse material systems, frequent process optimization, and stringent film uniformity requirements encountered during display panel R&D, MANST leverages its extensive expertise in precision coating technologies to deliver an integrated spin coating and EBR solution, providing reliable equipment support for the development of next-generation display panel manufacturing processes.

01 Thee Core Advantages for Advanced Process Development

As one of the core systems delivered in this project, the Spin Coater is designed for display panel and semiconductor R&D applications, supporting a wide range of photoresists for efficient process development and validation.

High-Precision Coating with Broad Material Compatibility

Equipped with a high-precision closed-loop servo motion control system, the Spin Coater achieves within-substrate and substrate-to-substrate uniformity of ≤2% while supporting coating thicknesses from 0.5 to 50 μm. Compatible with photoresists and a wide range of process chemicals, the system enables process development from ultra-thin to thick-film applications. Manual, semi-automatic, and fully automatic operating modes provide greater flexibility and significantly improve R&D efficiency.

Precise Fluid Control for Stable Process Performance

To accommodate process chemicals with viscosities ranging from 0 to 3000 cP, the system features an automatic multi-nozzle switching mechanism for rapid material changeover. A closed-loop temperature control system extends from the supply tank through the fluid delivery lines, maintaining temperature stability within ±0.2°C to ensure consistent fluid properties, improve coating uniformity, and enhance process repeatability.

The accompanying EBR System provides an edge bead removal width of 2–3 mm with an accuracy of ±0.3 mm, effectively minimizing edge bead buildup and delivering cleaner substrate edges for subsequent lithography, bonding, and other downstream processes.

Intelligent Process Management for Digital R&D

The platform supports the management and rapid recall of multiple process recipes, enabling efficient validation across different material systems and process windows. Critical process parameters are monitored in real time, with complete data logging and traceability throughout the entire process. Compatible with the OPC protocol, the system also supports connectivity with MES and upstream/downstream equipment, providing a robust digital foundation for process optimization and smart manufacturing.

The flatbed coating equipment and VCD equipment delivered alongside have been reliably deployed at multiple leading customers, with their performance and process reliability validated across numerous projects. They can work in coordination with the spin coating equipment to enable efficient validation of critical R&D processes, further enhancing the overall operational efficiency of the R&D platform.

02 Professional Project Delivery for Faster R&D Deployment

From project initiation through final delivery, the MANST project team remained customer-focused, working closely with the customer on process adaptation, equipment integration, installation, commissioning, and technical training.

To meet the stringent requirements for process stability, material compatibility, and data management in display R&D, the team continuously optimized the equipment solution and completed multiple rounds of process validation and performance testing, providing reliable support for the customer's subsequent process development.

03 End-to-End Equipment Capabilities for Industrial Scale-Up

Building on years of expertise in precision coating technologies, MANST continues to expand its product portfolio across applications including perovskite solar cells, semiconductor panel-level packaging, and display manufacturing. The company has established a comprehensive precision coating solution covering laboratory R&D, pilot-scale validation, and high-volume manufacturing, with multiple successful project deliveries completed across different application scenarios.

Looking ahead, MANST will continue to drive innovation in precision coating technologies and further strengthen its precision coating equipment portfolio. By delivering more stable, efficient, and intelligent solutions, MANST remains committed to supporting the sustainable development of the global display and pan-semiconductor industries.